reactive sputtering造句怎么写
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In particular, the amorphous titanium oxide is obtained by using the reactive sputtering method and via deposition at a low temperature and at a high film formation rate.
Effect of Technological parameters on deposition rate of ZAO films prepared by DC magnetron reactive sputtering
Characteristics of HfO_xN_y thin films by rf reactive sputtering at different deposition temperatures
Investigation of mechanical properties of ZrCN thin films fabricated by DC magnetron reactive sputtering
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