reactive sputtering造句怎麼寫

In particular, the amorphous titanium oxide is obtained by using the reactive sputtering method and via deposition at a low temperature and at a high film formation rate.

Effect of Technological parameters on deposition rate of ZAO films prepared by DC magnetron reactive sputtering

Characteristics of HfO_xN_y thin films by rf reactive sputtering at different deposition temperatures

Investigation of mechanical properties of ZrCN thin films fabricated by DC magnetron reactive sputtering