- ThisarticlereviewsthebasicphysicsofECRdischargeandexperimentalresearch,anddescribesnewapplicationsofECRplasmainsurfaceprocessing,plasmacoatingandionsource.SpectroscopicStudyontheInteractionsbetweenPulsed-Laser-ablation-producedPlasmaandECRPlasma在高E...
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